2008 IEEE SW Test Workshop
(Each presentation is in Adobe Acrobat format)

TABLE OF CONTENTS

Tutorial Session - Controlling Pad, Bump, and Probe Card Damage
Dinner Session - Year in Review and Keynote
Opening Session - Chairman's Welcome and Lifetime Achievement Award
Session 1 - MEMs for Production Level Probing
Session 2 - Advances in Traditional Probe Card Technologies
Session 3 - Improving Test Cell Performance
Session 4 - Power and High Voltage
Session 5 - Large Array Probing
Session 6 - Probe Potpourri
Session 7 - Probe Card Cleaning Practices
Session 8 - Strategic Design Methodologies
Session 9 - Probe Challenges
Poster Session


 

Tutorials - CONTROLLING PAD, BUMP, AND PROBE CARD DAMAGE
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

 

"Bond Pad Damage Tutorial"

Ken Karklin
Touch Down Technologies

Jerry Broz, Ph.D.

International Test Solutions

Bill Mann
Chair Emeritus
SW Test Workshop

 

"Advanced Confocal Microscopy on a Process Capable Platform"

Eddy Robinson, Ph.D.
Hyphenated Systems

 

 


"Achieving Tool-tool Correlation and Tool Stability for Probe Mark Inspection (PMI) in Automotive Applications"
Rajiv Roy
Rudolph Technologies

 

 


"Detecting Killer Particles to Protect Multi-DUT Probe Cards"
Amir Gilad
Udi Efrat
Guy Kafri
Camtek

 


DINNER SESSION
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Probe Year in Review"

Jerry Broz, Ph.D.
General Chair
SW Test Workshop

Bill Mann
Chair Emeritus

SW Test Workshop

 


Keynote Speaker - "Wafer Test Industries Impact on ATE"

Debbora Ahlgren
Vice President and Chief Marketing Officer
Verigy, Inc.

 

 



CHAIRMAN'S WELCOME AND OVERVIEW
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Welcome to Semiconductor Wafer (SW) Test Workshop 2008"

Jerry Broz, Ph.D.
General Chair
SW Test Workshop

 

 


"SWTW Lifetime Achievement Award" as presented by Jerry Broz, Ph.D.

Awarded to ...

Don Snow

CEO Emeritus

Founder of Applied Precision, LLC.

 

 



Session 1 - MEMS FOR PRODUCTION-LEVEL PROBING
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Novel Method to Store Spring Energy in Probes"

Salleh Ismail, Ph.D.
TouchDown Technologies
 

 


"Mechanical Design of MEMS Probes for Wafer Test"
Chris Folk
Microfabrica
 

 


"MicroProbe Vx-MP Probe Card Technology"
January Kister
Steve Hopkins
Microprobe, Inc.



Session 2 - ADVANCES IN TRADITIONAL PROBE CARD TECHNOLOGIES
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"'Argon': A new Epoxy Technology for Probing POA Power Devices"

Raffaele Vallauri
Massimo Gervasoni
Luca Cecchetto
Lucia Zullino
STMicroelectronics
Stefano Lazzari
Riccardo Vettori
Carlo Albini
Technoprobe

 


"Vertical Probe Alternative for Cantilever Pad Probing"

Robert Doherty
Analog Devices
Robert Rogers
Wentworth Labs

 


Winner - Most Inspirational Presentation
"Automatic Probe Assembly Machine"

Jung-pyo Chun
Dave Oh
Kyung-hwan Kim
TSE Co.,Ltd.

 

 



Session 3 - IMPROVING TEST CELL PERFORMANCE
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Mechanical Simulation of Probing on SMART POWER POA Devices"

Luca Cecchetto
Lucia Zullino
Raffaele Vallauri
Lorenzo Cerati
Antonio Andreini
STMicroelectronics

Stefano Lazzari
Riccardo Vettori
Carlo Albini
Technoprobe
 


"Use of On-Line Probe-to-Pad-Alignment (PTPA) Data to Improve Test Cell Performance"

Ernesto Cornejo
Micron Technology
   


"Statistical Process Control for the Sort Area"

Darren Coil
Rudolph Technologies
   


"ISMI Wafer Probe Council Team Activities & Industry Perspectives"

Boyd Daniels
Texas Instruments
Stu Crippen
Intel Corporation
Tom Wear
ISMI SEMATECH



Session 4 - POWER AND HIGH VOLTAGE
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

Winner - Best Presentation, Tutorial in Nature
"Real-World Avalanche Testing of Single-Die, Wafers, Hybrid Modules, and Packaged Devices"

Steven T. Clauter
Integrated Technology Corporation

Taichi Ukai
Taitech

 


"'Under Pressure' - From High Voltage to MEMS Pressure Sensors Wafer Probing"

Rainer Gaggl, Ph. D.
T.I.P.S.Messtechnik GmbH

   



Session 5 - LARGE ARRAY PROBING
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Challenges of 300mm Probe"

Rod Doe
Rudolph Technologies

 


"40k Probes on 300mm Probe Card - another step towards 1 touchdown DRAM SORT"

Michael Hubner, Ph.D.
FormFactor
 


"Electrical Planarity Characterization of High Parallelism Probe Cards"

John Caldwell
Micron Technology


"High-Performance Contactors for Wafer-Scale Test (WST)"

Jim Brandes
Everett Charles Technologies



Session 6 - PROBE POTPOURRI
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Comparison of Drilling Rates and Tolerances of Laser-Drilled holes in Silicon Nitride and Polyimide Vertical Probe Cards"

Alan Ferguson, Ph.D.
Oxford Laser
 


"Non-contact Test at Advanced Process Nodes"

Chris Sallathamby, Ph.D.
Brian Moore
Jeff Hintzke
S. Slupsky
Scanimetrics

 

 

 

"CO2 Composite Spray Technology for Probe Card Cleaning"

David P. Jackson
Cool Clean Technologies
 



Session 7 - PROBE CARD CLEANING PRACTICES
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Probe Card Cleaning Media Survey"

Eric Hill
Josh Smith
Cascade Microtech
   

 


Winner - Best Technical Presentation

"Methodologies for Assessing On-line Probe Process Parameters"

Jan Martens
NXP Semiconductors
(Hamburg)

Simon Allgaier
FeinMetall, GmbH

 

Jerry Broz, Ph.D.
International Test Solutions
 


Winner - Best Data Presentation
"VFPP-Very Fine Pitch 60uM Probe Card Technology Optimization"

John D Wolfe
James Tong
Norman Armendariz, Ph.D.
Texas Instruments

 


"Probe-tip Clean on Demand"

Rob Marcelis
Salland Engineering

 

 



Session 8 - STRATEGIC DESIGN METHODOLOGIES
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"Design for Probe
"

E Boyd Daniels
Norm Armendariz, Ph.D.
Texas Instruments


"Globalization and its Impact on the Probing Process
"

Manish Gulati
FormFactor, Inc.

Alan Romreill
Spansion


"Tangible Value can be Realized by Standardizing Probe Interfaces"

Keith Imai
Semiconductor Test Consortium

 

 

"Accelerating CAD Design of Probe Cards Using Allegro System Architect"

S. Dharmarajan
Mike Goode
Cadence

 


Session 9 - PROBE CHALLENGES
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

"
Effect of Ground Return Path on Timing Accuracy"

Gert Hohenwarter
Gatewave Northern


"Overcoming the Challenges of Parallel RF Test
"

Roger Hayward
Cascade Microtech

 


"An Advanced Cantilever Probe Card with High Frequency Bandwidth (>3GHz) and Experimental Result"

Morgan Ku
Phil Hsieh
Jason Ho
Sobers Chang
Seenew Lai
Dick Ho
MPI / MJC Probe, Inc.

 


POSTER SESSION
Top | Session 1 | Session 2 | Session 3 | Session 4 | Session 5 | Session 6 | Session 7 | Session 8 | Session 9 | Poster

CO2 Composite Spray Technology for Probe Card Cleaning
David P. Jackson
Cool Clean Technologies

Winner - Best Poster Presentation
Clean the WAFER, NOT the PROBE CARD!
Terence Q. Collier
CVInc
David B. Rennie & Chuck Lhota
Air Products & Chemicals

Unlocking the Mystery of Precision Inductors in High Volume Production RF Test Environments
Roger Hayward
Cascade Microtech

 

Advanced Technology for High Parallelism Testing of Image Sensor Devices
Phill Mai
JEM America

Implementing Tool Conversion Request (TCR) Protocol to Ensure the Effectiveness of Copper Contamination Control
Hasmayati Bakar & Zaiki Awang
Universiti Teknologi MARA
Wan Ab Aziz Wan Razali, Saiful Bahril Yeop Sohor, Harriman Razman & Raja Muhammad Zakwan
Silterra

Manager III + System Accuracy and Repeatability
Oscar Beijert
Beijert Engineering

Comparison of Laser Drilled Holes in Silicon Nitride and Polyimide Vertical Probe Cards
Alan Ferguson, Ph. D., Patrick Lyon, Dimitris Karnakis & Martyn Knowles
Oxford Laser

Automatic Probe Assembling Machine
Dave Oh, Kyung-hwan Kim & Jung-pyo Chun
TSE Co.,Ltd.

 


SWTW 2007 Chairs:

  • Dr. Jerry Broz, International Test Solutions, General Chair

  • Brett Crump, Micron Technologies, Technical Program Chair

  • William Mann, Gneral Chair Emeritus

  • Maddie Harwood, CEM, Inc.,Finance Chair

  • Meredith M. Griffith, CEM, Inc., Registration / EXPO Coordinator

SWTW 2007 Steering Committee:

  • Nadine Aldahhan, Freescale Semiconductor

  • Jack Courtney, IBM Microelectronics

  • Warren "Stu" Crippen, Intel

  • Michael Egloff, AMD, Expo Coordinator

  • Michael Harris, Texas Instruments

  • Ken Karklin, Touchdown Technologies, Poster Session Coordinator / Program Committee

  • Ger Koch, NXP Semiconductor

  • Patrick Mui, JEM-America, Poster Session Coordinator / Program Committee

  • Rey Rincon, Integrated Test Corporation

  • Roger Sinsheimer, Xandex, Program Committee

  • Fred Taber, BiTS Workshop, Proceedings Coordinator


 

The presentations included in the SWTW proceedings reflect the authors opinions and are presented without change. Inclusion in the proceedings does not constitute an endorsement by the SouthWest Test Workshop Committee, IEEE Computer Society or the IEEE Test Technology Council.

Papers previously copyrighted or with copyright restrictions cannot be presented. In keeping with a workshop environment and to avoid copyright issues, SWTW does not officially seek a copyright ownership / transfer from authors. Authors agree by submitting their work that their presentation is original work and substantially not published previously or copyrighted, may be referenced in the work of others, will be assembled / distributed in the SWTW Proceedings, and made available for download by anyone from the SWTW website.